Axcelis announces multiple shipments of Purion Power Series implanters

Axcelis Technologies announced multiple shipments of the Purion Power Series ion implanter systems to leading silicon carbide power device chipmakers worldwide. The shipments, all delivered in the second quarter, included a Purion H200 SiC evaluation system for a leading SiC power device manufacturer in the United States as well as multiple revenue systems for customers in Asia. The models of Purion Power Series implanters shipped included the Purion H200 high current, Purion EXE high energy, the Purion XE high energy and the Purion M medium current implanters. The systems will be used in high volume production of power devices supporting automotive industry electric vehicle applications. Several of the systems shipped from the Axcelis Asia Operations Center in South Korea.