Axcelis Technologies announced multiple shipments of the Purion Power Series ion implanter systems to leading silicon carbide, or SiC, power device chipmakers worldwide. The shipments, all shipped in the first quarter, included the Purion H200 SiC high current, the Purion XE SiC high energy and the Purion M SiC medium current implanters. The 150mm and 200mm systems will be used in high volume production of power devices supporting automotive, industrial, energy, and other power intensive applications.
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