Axcelis Technologies announced multiple shipments of the Purion Dragon high current implanter, including a follow-on order and a new customer evaluation to semiconductor manufacturers in Asia for advanced memory and advanced logic device development and device fabrication. The systems shipped in the fourth quarter of 2022. Executive Vice President, Marketing and Applications, Greg Redinbo, commented, "We’re pleased to support our existing customer’s fab capacity expansion and are also excited about our new customer evaluation focused on R&D for advanced logic nodes. The Purion Dragon was developed to address chipmakers’ most challenging ion implantation applications by delivering the highest levels of process control with significant productivity gains for high current applications. The Purion Dragon features a revolutionary high current implanter architecture, featuring innovative orthogonal beam optics, providing industry leading process control capability, designed to address critical implant steps for advanced memory and logic applications."
Published first on TheFly
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