Axcelis announces follow-on shipments of the Purion H current implanter

Axcelis Technologies announced follow-on shipments of the Purion H high current implanter to multiple fabs in support of the customer’s most advanced logic device technology manufacturing ramp. The systems shipped in the Q4. Purion H ion implanters bring the industry-leading process control of our medium current platforms to the full range of demanding, high-current applications. The flexibility of the platform enables us to tailor Purion H to the specific energy or dosing requirements of your application.